• High Resolution 3D Nanolithography
• 3D patterning of nanostructures with high resolution and simultaneous in-situ AFM imaging
• Device Fabrication – Accurate Overlay and no beam damage
• Compatible with standard pattern transfer processes like reactive-ion etching, electroplating and lift-off
• Wide range of applications of nanophotonics, nanooptics, nanomagnetism, nanoelectronics, plasmonics, etc.