Compact Nano-Imprint Tool and Mold Fabrication
• Thermal nano-imprint, UV nano-imprint, Imprint in vacuum
• Up to 4″ wafer
• Mold Fabrication – Silicon, Quartz, Ni shims, etc.
• Up to 4″ wafer
• Mold Fabrication – Silicon, Quartz, Ni shims, etc.